The electrostatic accelerators with low terminal voltage less than 1 MeV have been successfully used for 14C AMS. Other types of accelerators have also been investigated for AMS applications, such as mini-cyclotron for 14C AMS and RFQ for 3H AMS. This paper will show that small RFQ accelerator is suitable for AMS 14C measurements, too. Well-designed RFQ can realize low energy spread and high isotopic selection with a length about 1 m and reasonable power consumption. Compared with small tandem accelerator the RFQ do not need isolation gas and much more beam can be loaded. Its stripper is at ground potential and there is no further acceleration after stripper so the background from charge exchange will be lower. Compared with small single-terminal high-voltage accelerator both ion source and high-energy analysis system of the RFQ-AMS are in the ground potential so its operation and maintenance will be much easier. The RFQ design and the whole system will be described.
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