To take full advantage of the addition of a modified Cameca IMS-6f secondary ion mass spectrometer (SIMS) as the ion source, the Naval Research Laboratory's unique trace element accelerator mass spectrometer (TEAMS) has undergone a major reconfiguration and upgrade. The tank has been relocated in the building and rotated 180 degrees. Two new lenses have been mounted between the chain motors to match the 10 keV SIMS ion beam to the acceptance of the 3-MV Pelletron, while maintaining the ability to inject 70-keV ions from the MC-SNICS. Over 10 meters of flight path after the Pelletron were removed, and the S bend was changed to a U bend to form an angle-focusing energy-insensitive mass spectrometer. The new configuration requires no use of quadrupoles in charge state 7, and only weak focusing after the tank in charge state 3. Capabilities for ion implantation and surface analysis are maintained by relocating these beam lines after the mass spectrometer. This presentation describes in detail the installation of the Cameca IMS 6f. This includes low-energy optical calculations and a description of the hardware required.
This work is partially supported by the United States Office of Naval Research and a grant from NASA.
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